제품명 : Gas Delivery Module
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[Specifications]



-Mass Flow Controller (MKS 1179A)
-Pneumatic Diaphragm Valve (Swagelok)
-Manual Diaphragm Valve (Swagelok)
-In Line Filter (0.003µ, MVCR)
-Auto Welding
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[적용 장비]
-CVD,

목록