FC-R7800 (AERA)
Mass Flow Controller
Hitachi Metals Aera® FC-R7800 series delivers precise flow control, as well as the corrosion resistance and high leak integrity of metal seals, to suit the major-ity of gas-controlled applications.
Convenience-enhancing features, such as standard electrical connectors and standardized critical dimensions allow quick-and-easy replacement of existing mass flow controllers (MFCs).
Features & Benefits
Fast Response
Advances in the FC-R7800 series’ technical design deliver enhanced operation compared to
competing mass flow controllers. These advances include a highly sensitive, rapid-response,
small-diameter sensor. Further, the FC-R7800 series’ normally-open or normally-closed solenoid
design supplies superior response times. These speed enhancements minimize over-shoot and
under-shoot, and produce an actual-flow settling time of < 1 sec between set points.
(Less than 3sec for FC-R7820CD,FC-R7820D).
Superior Reliability
High-quality electronic components and a robust, minimal-parts design stand up to the effects
of strong RF fields and other operational demands, delivering outstanding long-term zero-drift
stability — < 0.5% of full-scale flow over one year. With over 70,000 units delivered in
FC78X FCR78X series MFCs, < 0.5% are returned within a year of shipment.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with
no installation hassles. Certain models feature standard electrical connectors and critical dimensions
to easily fit existing systems.
Dimensions
Specifications
